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Шығарылым Бөлім Атауы Файл
Том 52, № 1 (2023) ДИАГНОСТИКА Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy PDF
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Том 52, № 2 (2023) ДИАГНОСТИКА SEM Measurements of the Dimensions of Relief Structures in the Technological Process of Manufacturing Microcircuits PDF
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Том 52, № 1 (2023) ДИАГНОСТИКА Электрофизические характеристики и эмиссионные спектры плазмы тетрафторметана PDF
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Том 52, № 1 (2023) ИСКУССТВЕННЫЙ ИНТЕЛЛЕКТ Искусственный интеллект никогда не заменит полностью человека PDF
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Том 52, № 2 (2023) QUANTUM TECHNOLOGIES Investigation of the Possibility of Optimizing the Interaction of NV Centers and Photons by Changing the Shape of Microresonators PDF
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Том 52, № 1 (2023) МОДЕЛИРОВАНИЕ ПРИБОРОВ Calculation of the Electric Field Strength and Current Density Inside a Thin Metal Layer, Taking into Account the Skin Effect PDF
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Том 52, № 2 (2023) LITHOGRAPHY Cross Sections of Scattering Processes in Electron-Beam Lithography PDF
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Том 52, № 1 (2023) МОДЕЛИРОВАНИЕ ТЕХНОЛОГИЧЕСКИХ ПРОЦЕССОВ Simulation of Supercell Defect Structure and Transfer Phenomena in TlInTe2 PDF
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Том 52, № 1 (2023) МОДЕЛИРОВАНИЕ ТЕХНОЛОГИЧЕСКИХ ПРОЦЕССОВ Разработка методики построения нелинейной модели метаморфного 0.15 мкм МHEMT InAlAs/InGaAs транзистора PDF
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Том 52, № 2 (2023) ПРИБОРЫ Oxide Memristors for ReRAM: Approaches, Characteristics, and Structures PDF
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Том 52, № 1 (2023) ПРИБОРЫ Study of Photodetectors with Schottky Barriers Based on the IrSi–Si Contact PDF
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Том 52, № 1 (2023) ПРИБОРЫ Контактно-транспортные и автоэмиссионные свойства низкоразмерных 2D углеродных гетероструктур PDF
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Том 52, № 2 (2023) ТЕХНОЛОГИИ Plasma Parameters and Kinetics of Reactive Ion Etching of SiO2 and Si3N4 in an HBr/Cl2/Ar Mixture PDF
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Том 52, № 2 (2023) ТЕХНОЛОГИИ Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide PDF
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Том 52, № 1 (2023) ТЕХНОЛОГИИ Параметры газовой фазы и кинетика реактивно-ионного травления SiO2 в плазме CF4/C4F8/Ar/He PDF
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Том 52, № 3 (2023) ДИАГНОСТИКА Surface Morphology and Photoluminescence Spectra of Pseudomorphic {InGaAs/GaAs} Superlattices on GaAs (100), (110), and (111)A Substrates PDF
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Том 52, № 4 (2023) QUANTUM TECHNOLOGIES Tomography of Detectors Taking Dead Time into Account PDF
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Том 52, № 5 (2023) ДИАГНОСТИКА Electrophysical Parameters and Emission Spectra of the Glow Discharge of Difluorodichloromethane PDF
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Том 52, № 3 (2023) QUANTUM TECHNOLOGIES Precise Tomography of Qudits PDF
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Том 52, № 4 (2023) MODELING Simulation of Silicon FETs with a Fully Enclosed Gate with a High-k Gate Dielectric PDF
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Том 52, № 3 (2023) QUANTUM TECHNOLOGIES Recording the Polarization State of a Photon in the Correlated Electronic States of an Array of Quantum Dots PDF
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Том 52, № 5 (2023) LITHOGRAPHY Protective Freely Hanging Films for Projection Lithography Installations in the Extreme UV Range PDF
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Том 52, № 4 (2023) MODELING Influence of Boundary Conditions on Quantum Magnetotransport in a Thin Film PDF
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Том 52, № 5 (2023) MODELING Simulation of the Effect of Lattice Defects on the Work of Separating Joined Materials PDF
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Том 52, № 5 (2023) MODELING A Computer Investigation of the Effect of High-Resistance Layer Inhomogeneities on Resistive Switching in a Bismuth Selenide Microcrystal Structure PDF
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Том 52, № 3 (2023) MODELING Design of a Nonlinear Model of a Pseudomorphic 0.15 μm рHEMT AlGaAs/InGaAs/GaAs Transistor PDF
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Том 52, № 4 (2023) НАДЕЖНОСТЬ Study of the Sensitive Region of a MOS Transistor to the Effects of Secondary Particles Arising from Ionizing Radiation PDF
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Том 52, № 3 (2023) MODELING Simulation of the Adsorption and Diffusion of Lithium Atoms on Defective Graphene for a Li-Ion Battery PDF
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Том 52, № 5 (2023) ПЛАЗМЕННЫЕ ТЕХНОЛОГИИ The Influence of Small F2, H2, and HF Additives on the Concentration of Active Particles in Tetrafluoromethane Plasma PDF
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Том 52, № 5 (2023) MEMORY Patterns of the Formation of Mobile Localized Magnetic Configurations and Technology for Manufacturing Structures for the Implementation of Magnetic Memory Elements PDF
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Том 52, № 4 (2023) НАДЕЖНОСТЬ Single Event Displacement Effects in a VLSI PDF
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Том 52, № 5 (2023) ПРИБОРЫ Neuromorphic Systems: Devices, Architecture, and Algorithms PDF
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Том 52, № 3 (2023) МЭМС–УСТРОЙСТВА Fast Electrochemical Micropump for Portable Drug Delivery Module PDF
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Том 52, № 4 (2023) ПЛАЗМЕННЫЕ ТЕХНОЛОГИИ Concentration of Fluorine Atoms and Kinetics of Reactive-Ion Etching of Silicon in CF4 + O2, CHF3 + O2, and C4F8 + O2 Mixtures PDF
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Том 52, № 4 (2023) ПРИБОРЫ Influence of Structural Defects on the Electrophysical Parameters of pin-Photodiodes PDF
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Том 52, № 3 (2023) ТЕХНОЛОГИИ Hydrogen Plasma under Conditions of Electron-Cyclotron Resonance in Microelectronics Technology PDF
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Том 52, № 4 (2023) ПРИБОРЫ Multilevel Memristive Structures Based on YBa2Cu3O7–δ Epitaxial Films PDF
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Том 52, № 3 (2023) УСТРОЙСТВА Simulation of a System of Nanoantennas Located in a TSV Channel as a System for Receiving and Transmitting Data PDF
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Том 52, № 5 (2023) ПРИБОРЫ Influence of Hot Carrier Degradation on the Characteristics of a High-Voltage SOI Transistor with a Large Drift Region PDF
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Том 52, № 4 (2023) СЕНСОРЫ Study of the Sensor Properties of Ordered ZnO Nanorod Arrays for the Detection of UV Radiation PDF
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Том 52, № 5 (2023) ТЕХНОЛОГИИ Effect of the Material of Electrodes on Electroformation and Properties of Memristors Based on Open Metal–SiO2–Metal Sandwich Structures PDF
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Том 52, № 4 (2023) ТЕХНОЛОГИИ Effect of Magnetron Sputtering Power on ITO Film Deposition at Room Temperature PDF
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Том 52, № 4 (2023) ТЕХНОЛОГИИ Mechanisms of the Redistribution of Carbon Contamination in Films Formed by Atomic Layer Deposition PDF
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Том 52, № 6 (2023) ДИАГНОСТИКА PROBE AND SPECTRAL DIAGNOSTICS OF PLASMA GAS ENVIRONMENT: BCl3-Cl2 PDF
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Том 52, № 6 (2023) МЭМС-УСТРОЙСТВА MEMS SWITCH BASED ON CANTILEVER WITH INCREASED CONTACT FORCE PDF
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Том 52, № 6 (2023) MODELING Simulation of vertical ballistic quantum-barrier field-effect transistor based on undoped AlxGa1–xAs quantum nanowire PDF
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Том 52, № 6 (2023) MODELING Performance calculation for a MEMS switch with «floating» electrode PDF
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Том 52, № 6 (2023) ПРИБОРЫ Electrophysical parameters of p-i-n photodiodes, irradiated with 60Co γ-quanta PDF
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Том 52, № 6 (2023) ПРИБОРЫ OPTICALLY PUMPED BIPOLAR TRANSISTOR PDF
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Том 52, № 6 (2023) ПРИБОРЫ Prototypes of devices for heterogeneous hybrid semiconductor electronics with an embedded biomolecular domain PDF
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Том 52, № 6 (2023) ПРИБОРЫ Design of integrated voltage multipliers using standard CMOS technologies PDF
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Том 53, № 1 (2024) ДИАГНОСТИКА Analysis of Nonlinear Distortions of Dphemt Structures Based on a GaAs/InGaAs Compound with Double-Sided Delta-Doping PDF
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Том 53, № 1 (2024) ДИАГНОСТИКА Structuring of the Surface of Thin Carbon Films During Activation by Microsecond Current Pulses PDF
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Том 53, № 1 (2024) MODELING Modeling of Physical-Chemical and Electronic Properties of Lithium-Containing 4H—SiC and Binary Phases of the Si—C–Li System PDF
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Том 53, № 1 (2024) MODELING Modeling of the Electronic Properties of M-Doped Supercells (М = Zr, Nb) with a Monoclinic Structure For Lithium-Ion Batteries PDF
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Том 53, № 1 (2024) ПРИБОРЫ Electron Transport in a Bipolar Transistor with a Superlattice in the Emitter PDF
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Том 53, № 1 (2024) ПРИБОРЫ Research of Memristor Effect in Crossbar Architecture for Neuromorphic Artificial Intelligence Systems PDF
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Том 53, № 1 (2024) ТЕХНОЛОГИИ Application of Spectral Ellipsometry for Dielectric, Metal and Semiconductor Films in Microelectronics Technology PDF
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Том 53, № 1 (2024) ТЕХНОЛОГИИ Features of Electroforming and Functioning of Memristors Based on Open TiN–SiO2–Mo Sandwich Structures PDF
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Том 53, № 1 (2024) ТЕХНОЛОГИИ Molecular Layering of an Additive Layer of Silicon Dioxide on Anodized Tantalum and Niobium Oxides PDF
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Том 53, № 1 (2024) ТЕХНОЛОГИИ Parameters and Composition of Plasma in a Mixture of CF4 + H2 + Ar: Effect of the CF4/H2 Ratio PDF
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Том 53, № 1 (2024) ТЕХНОЛОГИИ Interconnects Materials for Integrated Circuit Technology Below 5 Nm Node PDF
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Том 53, № 2 (2024) ДИАГНОСТИКА Structural features and electrical properties of si(al) thermal migration channels for high-voltage photovoltaic converters PDF
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Том 53, № 2 (2024) MODELING Modeling the diffusion of atoms in multicomponent semiconductors in a disordered state PDF
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Том 53, № 2 (2024) MODELING Application of the finite element method for calculating the surface acoustic wave parameters and devices PDF
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Том 53, № 2 (2024) MODELING The new approach of a simulation low dose rate radiation effects in bipolar integrated circuits PDF
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Том 53, № 2 (2024) ТЕХНОЛОГИИ Ripple of a DC/DC converter based on SEPIC topology PDF
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Том 53, № 2 (2024) ТЕХНОЛОГИИ Temporary changes in current flow mechanisms in erbium-doped porous silicon PDF
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Том 53, № 2 (2024) ТЕХНОЛОГИИ Influence of nickel impurities on the operational parameters of a silicon solar cell PDF
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Том 53, № 3 (2024) ДИАГНОСТИКА A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering PDF
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Том 53, № 3 (2024) ДИАГНОСТИКА Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma PDF
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Том 53, № 3 (2024) MODELING Thermal modelling and layout optimization of GaN half-bridge IC with integrated drivers and power HEMTs PDF
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Том 53, № 3 (2024) MODELING Simulation of silicon conical field effect GAA nanotransistors with stack SiO2/HfO2 dielectric of gate PDF
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Том 53, № 3 (2024) MODELING Kinetics of electromigration mass transfer in micro- and nanoelectronics interface elements depending on the strength of thin-film junctions PDF
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Том 53, № 3 (2024) MEMORY The structure and formation of non-volatile memory cells of Superflash PDF
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Том 53, № 3 (2024) ПРИБОРЫ Development of the Ge-MDST instrument structure with an induced p-type channel PDF
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Том 53, № 3 (2024) ПРИБОРЫ Carrier Scattering Analysis in AlN/GaN HEMT Heterostructures with an Ultrathin AlN Barrier PDF
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Том 53, № 3 (2024) ПРИБОРЫ The Effect оf Laser Radiation оn Functional Properties of MOS Structures PDF
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Том 53, № 4 (2024) ДИАГНОСТИКА Study of the Photovoltaic Parameters of Inorganic Solar Cells Based on Cu2O and CuO PDF
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Том 53, № 4 (2024) QUANTUM TECHNOLOGIES CNOT Quantum Gate Based on Spatial Photonic Qubits Under Resonant Electro-Optical Control PDF
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Том 53, № 4 (2024) MEMRISTORS Evolution of the Current-Voltage Characteristic of a Bipolar Memristor PDF
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Том 53, № 4 (2024) MODELING Approximation of the Absorption Spectrum of Indium Phosphide in the Context of Simulation of the Process of Sensitivity Enhancement PDF
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Том 53, № 4 (2024) ТЕХНОЛОГИИ Methodology of Production of Photo-Sensitive Elements on Ptsi Basis PDF
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Том 53, № 4 (2024) ТЕХНОЛОГИИ Al Islands on Si(111): Growth Temperature, Morphology and Strain PDF
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Том 53, № 4 (2024) ТЕХНОЛОГИИ Plasmochemical and Reactive Ion Etching of Gallium Arsenide in Difluorodichloromethane with Helium PDF
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Том 54, № 1 (2025) ТЕХНОЛОГИИ AZ nLOF series photoresist films on monocrystalline silicon
Том 53, № 5 (2024) ДИАГНОСТИКА Electron cyclotron resonance plasma studies using the second cyclotron harmonic resonance PDF
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Том 53, № 5 (2024) QUANTUM TECHNOLOGIES Nanophotonic beam-splitter based on quantum dots with förster coupling PDF
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Том 53, № 5 (2024) LITHOGRAPHY New concept for the development of high-performance X-ray lithography PDF
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Том 53, № 5 (2024) MODELING Electron transport and field electron emission mechanisms in 2D noncrystalline hetero structures with quantum barrier PDF
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Том 53, № 5 (2024) MODELING Mathematical modeling of a microprocessor liquid cooling system PDF
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Том 53, № 5 (2024) MODELING Parameters matching of the thermoelectric system parameters for cooling heat-loaded electronics elements PDF
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Том 53, № 5 (2024) MODELING Investigation of ways to synthesize concurrent error-detection circuits based on boolean signals correction using uniform separable codes PDF
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Том 53, № 5 (2024) NEUROMORPHIC SYSTEMS Development of an imagery representation apparatus for information representation in neyromorphic devices PDF
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Том 53, № 5 (2024) ПРИБОРЫ Temperature dependences of the breakdown voltage of a high-voltage LDMOS transistor PDF
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Том 53, № 5 (2024) ТЕХНОЛОГИИ Producing of graphene: deposition and annealing PDF
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Том 53, № 6 (2024) ДИАГНОСТИКА Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma PDF
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Том 53, № 6 (2024) QUANTUM TECHNOLOGIES Influence of Manufacture Imperfections and Electrical Noise on Evolution of a Charge Qubit under Optical Control PDF
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Том 53, № 6 (2024) MEMRISTORS Simulation of Memristive Crossbar Array Electrical Behavior in Neuromorphic Electronic Blocks PDF
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Том 53, № 6 (2024) MEMRISTORS A Brief Overview of the Typology of Neurons and Analysis of Using Memristor Crossbars PDF
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Том 53, № 6 (2024) MODELING Modeling of Structural Properties and Transport Phenomena in Doped Multicomponent 2D Semiconductors PDF
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Том 53, № 6 (2024) ПРИБОРЫ III-nitride HEMT Heterostructures with an Ultrathin AlN Barrier: Fabrication and Experimental Application PDF
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Том 53, № 6 (2024) ПРИБОРЫ Tunnel Breakdown Bipolar Transistor PDF
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Том 53, № 6 (2024) ТЕХНОЛОГИИ Plasma Parameters and Si/SiO2 Etching Kinetics in Mixtures of Fluorocarbon Gases with Argon and Helium PDF
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Том 53, № 6 (2024) ТЕХНОЛОГИИ Conductivity Study of Carbon Nanotubes Deposited on Iridium Silicon-Silicide Substrate PDF
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Том 54, № 1 (2025) LITHOGRAPHY Investigation of double patterning method with the usage of antispacer
Том 54, № 1 (2025) MODELING Calculation of distributions of electron beam energy absorbed in PMMA and Si using various scattering models
Том 54, № 1 (2025) MODELING Exposure kinetics of a positive photoresist layer on an optically matched substrate
Том 54, № 1 (2025) MODELING Influence of boundary conditions on transport in a quantum well
Том 54, № 1 (2025) NANOSTRUCTURES Formation of nickel-based composite magnetic nanostructures for microelectronics and nanodiagnostics devices
Том 54, № 1 (2025) ТЕХНОЛОГИИ Study of deposition modes of Cu2O films by RF magnetron sputtering for application in solar cell structures
Том 54, № 1 (2025) ТЕХНОЛОГИИ Development of atomic layer deposition technological platform for the synthesis of micro- and nanoelectronics materials
Том 54, № 2 (2025) ДИАГНОСТИКА Regularities of X-ray transfer in doped multicomponent semiconductors for dosimetry
Том 54, № 2 (2025) ДИАГНОСТИКА Measuring adhesion energy between MEMS structures using an adhered cantilever
Том 54, № 2 (2025) MEMRISTORS Multilevel switchings in memristive structures based on oxidized lead selenide
Том 54, № 2 (2025) NANOSTRUCTURES Electrical characteristics of ruthenium lines with a cross-sectional area less than 1000 nm²
Том 54, № 2 (2025) NANOTRANSISTORS Effect of boundary roughness on the variability of the I-V data of silicon field-effect GAA nanotransistors
Том 54, № 2 (2025) ПРИБОРЫ Ferroelectric transistors: operating principles, materials, applications
Том 54, № 2 (2025) ТЕХНОЛОГИИ PRECISION ETCHING OF ALUMINUM CONDUCTORS IN THE TECHNOLOGY OF SWITCHING DEVICES OF MICROSYSTEMS TECHNOLOGY
Том 54, № 3 (2025) ДИАГНОСТИКА Method for automated calculation of grains and voids in metal films and TSV-structures
Том 54, № 3 (2025) ДИАГНОСТИКА Structure of thin titanium nitride films deposited by magnetron sputtering
Том 54, № 3 (2025) MEMRISTORS Reinforcement learning of spiking neural networks using trace variables for synaptic weights with memristive plasticity
Том 54, № 3 (2025) MEMRISTORS STABILIZATION OF MEMRISTOR CELL STATES DURING INITIAL SWITCHING PROCESS AFTER FORMING
Том 54, № 3 (2025) MODELING Features of upsets formation in VLSI under pulsed ionizing radiation
Том 54, № 3 (2025) ПРИБОРЫ Temperature characteristics of a simple current mirror on silicon high-voltage nLDMOS with a large drift area
Том 54, № 3 (2025) ТЕХНОЛОГИИ NANOSTRUCTURED RUTHENIUM ETCHING IN THREE-COMPONENT Cl2/O2/Ar PLASMA
Том 54, № 3 (2025) ТЕХНОЛОГИИ Self-assembly of 3d mesostructures using local ion-plasma treatment
Том 54, № 4 (2025) QUANTUM TECHNOLOGIES Development of a correlator for measuring the second-order autocorrelation function of single-photon sources
Том 54, № 4 (2025) LITHOGRAPHY Perspectives of electron-beam and ion-beam lithography development in Russia
Том 54, № 4 (2025) MODELING Modeling of Self-Assembly of Microinductors Produced Due to Residual Mechanical Stress
Том 54, № 4 (2025) MODELING Electrical conductivity of a thin polycrystalline film considering various specularity coefficients
Том 54, № 4 (2025) NEUROMORPHIC SYSTEMS Training of a Spiking Neural Network with a Consideration of Memristive Crossbar Array Characteristics
Том 54, № 4 (2025) NEUROMORPHIC SYSTEMS Hardware implementation of an asynchronous analog neural network with training based on unified cmos ip blocks
Том 54, № 4 (2025) ТЕХНОЛОГИИ Effect of rapid thermal annealing on the formation of aluminum-silicon and aluminum-polysilicon ohmic contacts in integrated microcircuits
Том 54, № 4 (2025) ТЕХНОЛОГИИ MULTILAYER EPITAXIAL SILICON STRUCTURES WITH SUBMICRON LAYERS GROWN BY SUBLIMATION MOLECULAR BEAM EPITAXI
Том 54, № 5 (2025) ДИАГНОСТИКА Method for testing the radiation resistance of semiconductor electronic materials in an electron microscope
Том 54, № 5 (2025) ДИАГНОСТИКА Complementary studies of aluminum thin films: resistivity and real structure
Том 54, № 5 (2025) QUANTUM TECHNOLOGIES Precise reconstruction of polarization quantum states under noisy measurement conditions
Том 54, № 5 (2025) MODELING On the correctness of the model description of the plasma composition in the mixture of SF 6 + He + O 2
Том 54, № 5 (2025) ПРИБОРЫ Structure and materials of FinFET transistors
Том 54, № 5 (2025) ТЕХНОЛОГИИ Processing of Silicon Carbide Plates with Bonded Diamond Tools
Том 54, № 5 (2025) ТЕХНОЛОГИИ On the influence of various oxygen-containing gases on composition of trifluoromethane plasma
Том 54, № 5 (2025) ТЕХНОЛОГИИ Deformation of MEMS Transducer Membrane Due to Stress in Deposited Film
Том 54, № 6 (2025) QUANTUM TECHNOLOGIES DESIGN OF FUZZY QUANTUM MEASUREMENT PROTOCOLS FOR ION-BASED QUDITS
Том 54, № 6 (2025) LITHOGRAPHY STABILIZING PROCESSING OF NEGATIVE PHOTORESIST FILMS OF THE AZ nLOF20XX SERIES ON SILICON
Том 54, № 6 (2025) MEMRISTORS FEATURES OF RESISTIVE SWITCHING OF MEMRISTORS BASED ON PbTe NANOPARTICLES WITH PPX UNDER PHOTOEXCITATION
Том 54, № 6 (2025) MODELING FLUOROPOLYMER FOR MICROELECTRONICS PRODUCTION (REVIEW)
Том 54, № 6 (2025) MODELING A COMPACT ELECTROSTATIC ACTUATOR WITH ENHANCED CONTACT FORCE FOR RESISTIVE MEMS SWITCH
Том 54, № 6 (2025) NANOSTRUCTURES INVESTIGATION OF THE MAGNETO-OPTICAL RESPONSE OF INDIVIDUAL LAYERS OF MULTILAYER MAGNETIC SYSTEMS
Том 54, № 6 (2025) MEMORY TERNARY MEMORY CELLS BASED ON PERFORATED MAGNETIC FILMS

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