电邮这篇文章 NANOSTRUCTURED RUTHENIUM ETCHING IN THREE-COMPONENT Cl2/O2/Ar PLASMA
- 作者: Amirov I.I.1, Izyumov M.O.1, Lopaev D.V.2, Rakhimova T.V.2, Kropotkin A.N.2, Voloshin D.G.2, Palov A.P.2
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隶属关系:
- The Center for Scientific and Information Technologies – Yaroslavl of the K.A. Valiev Department of Physico-Technological Research of the National Research Center “Kurchatov Institute”
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
- 期: 卷 54, 编号 3 (2025)
- 页面: 251-260
- 栏目: ТЕХНОЛОГИИ
- URL: https://bakhtiniada.ru/0544-1269/article/view/304937
- DOI: https://doi.org/10.31857/S0544126925030076
- EDN: https://elibrary.ru/pxpxqe
- ID: 304937
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详细
Using spectral and probe diagnostic methods for the radical composition and electronic component of the removed plasma of an RF discharge in a mixture of 50 %Ar/Сl2 /O2, low-energy (Ei ~80 eV) etching of a nanometer-thick Ru film was studied depending on pressure, RF power, and relative content of Сl2 /O2. With a 10–30 percent chlorine content in the plasma, a wide maximum of the Ru etching rate is observed. In a plasma of this composition, using an array of amorphous silicon nanoconuses as a mask, vertical nanoconded Ru structures with a height of 35 nm and a distance between them of 10–20 nm were obtained. The mechanism of Ru etching in plasma of 50 %Ar/Сl2 /O2 is discussed.
作者简介
I. Amirov
The Center for Scientific and Information Technologies – Yaroslavl of the K.A. Valiev Department of Physico-Technological Research of the National Research Center “Kurchatov Institute”
Email: ildamirov@yandex.ru
Yaroslavl, Russia
M. Izyumov
The Center for Scientific and Information Technologies – Yaroslavl of the K.A. Valiev Department of Physico-Technological Research of the National Research Center “Kurchatov Institute”
Email: ildamirov@yandex.ru
Yaroslavl, Russia
D. Lopaev
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
Email: ildamirov@yandex.ru
Moscow, Russia
T. Rakhimova
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
Email: ildamirov@yandex.ru
Moscow, Russia
A. Kropotkin
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
Email: ildamirov@yandex.ru
Moscow, Russia
D. Voloshin
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
Email: ildamirov@yandex.ru
Moscow, Russia
A. Palov
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
编辑信件的主要联系方式.
Email: ildamirov@yandex.ru
Moscow, Russia
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