Отправить статью по E-mail An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface
- Авторы: Kostanovskiy A.V.1, Pronkin A.A.1, Zeodinov M.G.1, Kostanovskaya M.E.1
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Учреждения:
- Joint Institute for High Temperatures, Russian Academy of Sciences
- Выпуск: Том 62, № 4 (2019)
- Страницы: 568-572
- Раздел: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/160845
- DOI: https://doi.org/10.1134/S0020441219030205
- ID: 160845
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Аннотация
An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp1 and sp3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.
Об авторах
A. Kostanovskiy
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Россия, Moscow, 125412
A. Pronkin
Joint Institute for High Temperatures, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: pronkin.a.a@gmail.com
Россия, Moscow, 125412
M. Zeodinov
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Россия, Moscow, 125412
M. Kostanovskaya
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Россия, Moscow, 125412
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