电邮这篇文章 An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface
- 作者: Kostanovskiy A.V.1, Pronkin A.A.1, Zeodinov M.G.1, Kostanovskaya M.E.1
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隶属关系:
- Joint Institute for High Temperatures, Russian Academy of Sciences
- 期: 卷 62, 编号 4 (2019)
- 页面: 568-572
- 栏目: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/160845
- DOI: https://doi.org/10.1134/S0020441219030205
- ID: 160845
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详细
An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp1 and sp3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.
作者简介
A. Kostanovskiy
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
俄罗斯联邦, Moscow, 125412
A. Pronkin
Joint Institute for High Temperatures, Russian Academy of Sciences
编辑信件的主要联系方式.
Email: pronkin.a.a@gmail.com
俄罗斯联邦, Moscow, 125412
M. Zeodinov
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
俄罗斯联邦, Moscow, 125412
M. Kostanovskaya
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
俄罗斯联邦, Moscow, 125412
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