Enviar artigo por via de e-mail An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface
- Autores: Kostanovskiy A.V.1, Pronkin A.A.1, Zeodinov M.G.1, Kostanovskaya M.E.1
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Afiliações:
- Joint Institute for High Temperatures, Russian Academy of Sciences
- Edição: Volume 62, Nº 4 (2019)
- Páginas: 568-572
- Seção: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/160845
- DOI: https://doi.org/10.1134/S0020441219030205
- ID: 160845
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Resumo
An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp1 and sp3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.
Sobre autores
A. Kostanovskiy
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Rússia, Moscow, 125412
A. Pronkin
Joint Institute for High Temperatures, Russian Academy of Sciences
Autor responsável pela correspondência
Email: pronkin.a.a@gmail.com
Rússia, Moscow, 125412
M. Zeodinov
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Rússia, Moscow, 125412
M. Kostanovskaya
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Rússia, Moscow, 125412
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