An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface

A. V. Kostanovskiy; A. A. Pronkin; M. G. Zeodinov; M. E. Kostanovskaya

doi:10.1134/S0020441219030205

An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface

Авторлар: Kostanovskiy A.V.¹, Pronkin A.A.¹, Zeodinov M.G.¹, Kostanovskaya M.E.¹
Мекемелер:
1. Joint Institute for High Temperatures, Russian Academy of Sciences
Шығарылым: Том 62, № 4 (2019)
Беттер: 568-572
Бөлім: Laboratory Techniques
URL: https://bakhtiniada.ru/0020-4412/article/view/160845
DOI: https://doi.org/10.1134/S0020441219030205
ID: 160845

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Аннотация

An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp¹ and sp³ hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.