An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface


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Abstract

An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp1 and sp3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.

About the authors

A. V. Kostanovskiy

Joint Institute for High Temperatures, Russian Academy of Sciences

Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412

A. A. Pronkin

Joint Institute for High Temperatures, Russian Academy of Sciences

Author for correspondence.
Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412

M. G. Zeodinov

Joint Institute for High Temperatures, Russian Academy of Sciences

Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412

M. E. Kostanovskaya

Joint Institute for High Temperatures, Russian Academy of Sciences

Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412

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