An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface
- Authors: Kostanovskiy A.V.1, Pronkin A.A.1, Zeodinov M.G.1, Kostanovskaya M.E.1
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Affiliations:
- Joint Institute for High Temperatures, Russian Academy of Sciences
- Issue: Vol 62, No 4 (2019)
- Pages: 568-572
- Section: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/160845
- DOI: https://doi.org/10.1134/S0020441219030205
- ID: 160845
Cite item
Abstract
An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp1 and sp3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.
About the authors
A. V. Kostanovskiy
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412
A. A. Pronkin
Joint Institute for High Temperatures, Russian Academy of Sciences
Author for correspondence.
Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412
M. G. Zeodinov
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412
M. E. Kostanovskaya
Joint Institute for High Temperatures, Russian Academy of Sciences
Email: pronkin.a.a@gmail.com
Russian Federation, Moscow, 125412
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