Crystallization of amorphous hydrogenated silicon (a-Si:H) films under irradiation with femtosecond laser pulses


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Crystallization of thin films of amorphous hydrogenated silicon under the irradiation of femtosecond laser pulses has been studied. It was found that the crystallization has a clearly pronounced threshold nature and depends on the laser emission wavelength. As shown the best results are achieved in crystallization at the laser wavelength range of 740–760 nm.

作者简介

V. Belik

Ioffe Physical Technical Institute

编辑信件的主要联系方式.
Email: v.belik@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021

O. Vasyutinskii

Ioffe Physical Technical Institute

Email: v.belik@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021

A. Kukin

Ioffe Physical Technical Institute

Email: v.belik@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021

M. Petrov

Ioffe Physical Technical Institute; Peter the Great St. Petersburg Polytechnic University

Email: v.belik@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 195251

R. Popov

Ioffe Physical Technical Institute; Peter the Great St. Petersburg Polytechnic University

Email: v.belik@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 195251

E. Terukov

Ioffe Physical Technical Institute; R&D Center for Thin-Film Technologies in Energetics

Email: v.belik@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 194064

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