Crystallization of amorphous hydrogenated silicon (a-Si:H) films under irradiation with femtosecond laser pulses


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Аннотация

Crystallization of thin films of amorphous hydrogenated silicon under the irradiation of femtosecond laser pulses has been studied. It was found that the crystallization has a clearly pronounced threshold nature and depends on the laser emission wavelength. As shown the best results are achieved in crystallization at the laser wavelength range of 740–760 nm.

Авторлар туралы

V. Belik

Ioffe Physical Technical Institute

Хат алмасуға жауапты Автор.
Email: v.belik@mail.ioffe.ru
Ресей, St. Petersburg, 194021

O. Vasyutinskii

Ioffe Physical Technical Institute

Email: v.belik@mail.ioffe.ru
Ресей, St. Petersburg, 194021

A. Kukin

Ioffe Physical Technical Institute

Email: v.belik@mail.ioffe.ru
Ресей, St. Petersburg, 194021

M. Petrov

Ioffe Physical Technical Institute; Peter the Great St. Petersburg Polytechnic University

Email: v.belik@mail.ioffe.ru
Ресей, St. Petersburg, 194021; St. Petersburg, 195251

R. Popov

Ioffe Physical Technical Institute; Peter the Great St. Petersburg Polytechnic University

Email: v.belik@mail.ioffe.ru
Ресей, St. Petersburg, 194021; St. Petersburg, 195251

E. Terukov

Ioffe Physical Technical Institute; R&D Center for Thin-Film Technologies in Energetics

Email: v.belik@mail.ioffe.ru
Ресей, St. Petersburg, 194021; St. Petersburg, 194064

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