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Regular Microstructures Based on Polyethylene Terephthalate Films


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Resumo

A method for forming regular dielectric and metallic microstructures based on polyethylene terephthalate films irradiated with a synchrotron radiation source through a mask with subsequent etching. To study their geometric parameters, scanning electron microscopy was used.

Sobre autores

V. Asadchikov

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Autor responsável pela correspondência
Email: asad@crys.ras.ru
Rússia, Moscow, 119333

S. Bedin

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences; Moscow Pedagogical State University

Email: asad@crys.ras.ru
Rússia, Moscow, 119333; Moscow, 119991

A. Vasil’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
Rússia, Moscow, 119333

Yu. Grigor’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
Rússia, Moscow, 119333

V. Naz’mov

Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences

Email: asad@crys.ras.ru
Rússia, Novosibirsk, 630090

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