Regular Microstructures Based on Polyethylene Terephthalate Films


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Аннотация

A method for forming regular dielectric and metallic microstructures based on polyethylene terephthalate films irradiated with a synchrotron radiation source through a mask with subsequent etching. To study their geometric parameters, scanning electron microscopy was used.

Авторлар туралы

V. Asadchikov

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Хат алмасуға жауапты Автор.
Email: asad@crys.ras.ru
Ресей, Moscow, 119333

S. Bedin

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences; Moscow Pedagogical State University

Email: asad@crys.ras.ru
Ресей, Moscow, 119333; Moscow, 119991

A. Vasil’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
Ресей, Moscow, 119333

Yu. Grigor’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
Ресей, Moscow, 119333

V. Naz’mov

Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences

Email: asad@crys.ras.ru
Ресей, Novosibirsk, 630090

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