Regular Microstructures Based on Polyethylene Terephthalate Films


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详细

A method for forming regular dielectric and metallic microstructures based on polyethylene terephthalate films irradiated with a synchrotron radiation source through a mask with subsequent etching. To study their geometric parameters, scanning electron microscopy was used.

作者简介

V. Asadchikov

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

编辑信件的主要联系方式.
Email: asad@crys.ras.ru
俄罗斯联邦, Moscow, 119333

S. Bedin

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences; Moscow Pedagogical State University

Email: asad@crys.ras.ru
俄罗斯联邦, Moscow, 119333; Moscow, 119991

A. Vasil’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
俄罗斯联邦, Moscow, 119333

Yu. Grigor’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
俄罗斯联邦, Moscow, 119333

V. Naz’mov

Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences

Email: asad@crys.ras.ru
俄罗斯联邦, Novosibirsk, 630090

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