Ferroelectric films of barium strontium titanate on semi-insulating silicon carbide substrates
- Авторы: Tumarkin A.V.1, Razumov S.V.1, Gagarin A.G.1, Odinets A.A.1, Mikhailov A.K.1,2, Pronin I.P.3, Stozharov V.M.4, Senkevich S.V.3, Travin N.K.5
-
Учреждения:
- St. Petersburg State Electrotechnical University (LETI)
- Dagestan State University
- Ioffe Physical Technical Institute
- Herzen State Pedagogical University of Russia
- Svetlana–Electronpribor Corporation
- Выпуск: Том 42, № 4 (2016)
- Страницы: 423-426
- Раздел: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/198792
- DOI: https://doi.org/10.1134/S1063785016040271
- ID: 198792
Цитировать
Аннотация
Thin ferroelectric BaxSr1–xTiO3 (BST) layers have been grown for the first time on semi-insulating silicon carbide substrates by RF magnetron sputtering of a ceramic target without using buffer sublayers. Results of investigation of the structure of obtained BST films and the electrical properties of related planar capacitors are presented. The obtained structures are characterized by high nonlinearity and low dielectric losses at microwave frequencies.
Ключевые слова
Об авторах
A. Tumarkin
St. Petersburg State Electrotechnical University (LETI)
Автор, ответственный за переписку.
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 197376
S. Razumov
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 197376
A. Gagarin
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 197376
A. Odinets
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 197376
A. Mikhailov
St. Petersburg State Electrotechnical University (LETI); Dagestan State University
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 197376; Makhachkala, Dagestan, 367000
I. Pronin
Ioffe Physical Technical Institute
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 194021
V. Stozharov
Herzen State Pedagogical University of Russia
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 191186
S. Senkevich
Ioffe Physical Technical Institute
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 194021
N. Travin
Svetlana–Electronpribor Corporation
Email: avtumarkin@yandex.ru
Россия, St. Petersburg, 194156
Дополнительные файлы
