Enviar artigo por via de e-mail Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond
- Autores: Bogdanov S.A.1, Gorbachev A.M.1, Radishev D.B.1, Vikharev A.L.1, Lobaev M.A.1
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Afiliações:
- Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
- Edição: Volume 45, Nº 2 (2019)
- Páginas: 89-92
- Seção: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/208201
- DOI: https://doi.org/10.1134/S1063785019020032
- ID: 208201
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Resumo
It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.
Sobre autores
S. Bogdanov
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
Rússia, Nizhny Novgorod, 603950
A. Gorbachev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Autor responsável pela correspondência
Email: gorb@appl.sci-nnov.ru
Rússia, Nizhny Novgorod, 603950
D. Radishev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
Rússia, Nizhny Novgorod, 603950
A. Vikharev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
Rússia, Nizhny Novgorod, 603950
M. Lobaev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
Rússia, Nizhny Novgorod, 603950
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