Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond
- 作者: Bogdanov S.A.1, Gorbachev A.M.1, Radishev D.B.1, Vikharev A.L.1, Lobaev M.A.1
-
隶属关系:
- Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
- 期: 卷 45, 编号 2 (2019)
- 页面: 89-92
- 栏目: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/208201
- DOI: https://doi.org/10.1134/S1063785019020032
- ID: 208201
如何引用文章
详细
It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.
作者简介
S. Bogdanov
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
A. Gorbachev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
编辑信件的主要联系方式.
Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
D. Radishev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
A. Vikharev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
M. Lobaev
Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences
Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
补充文件
