Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond


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It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.

作者简介

S. Bogdanov

Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences

Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950

A. Gorbachev

Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences

编辑信件的主要联系方式.
Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950

D. Radishev

Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences

Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950

A. Vikharev

Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences

Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950

M. Lobaev

Federal Research Center Institute of Applied Physics of the Russian Academy of Sciences

Email: gorb@appl.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950

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