Formation of ordered nano- and mesostructures in silicon irradiated with a single femtosecond laser pulse in different environments

Resumo

We report on a new class of ordered nano- and mesostructures, including distinct structured areas with subnanoscale roughness, produced by interaction of single tightly focused femtosecond laser pulses with a monocrystalline silicon surface under different environments. The environment was found to have a significant effect on the final morphology of near-surface layers of silicon.