Email this article An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)
- Authors: Rudyi A.S.1,2, Vasil’ev S.V.1,2, Lebedev M.E.2, Metlitskaya A.V.1,2, Mironenko A.A.2, Naumov V.V.2, Novozhilova A.V.1,2, Fedorov I.S.2, Churilov A.B.1,2
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Affiliations:
- Demidov Yaroslavl State University
- Institute of Physics and Technology (Yaroslavl Branch)
- Issue: Vol 43, No 6 (2017)
- Pages: 503-506
- Section: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/204839
- DOI: https://doi.org/10.1134/S106378501706013X
- ID: 204839
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Abstract
The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.
About the authors
A. S. Rudyi
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Author for correspondence.
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150000; Yaroslavl, 150007
S. V. Vasil’ev
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150000; Yaroslavl, 150007
M. E. Lebedev
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150007
A. V. Metlitskaya
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150000; Yaroslavl, 150007
A. A. Mironenko
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150007
V. V. Naumov
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150007
A. V. Novozhilova
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150000; Yaroslavl, 150007
I. S. Fedorov
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150007
A. B. Churilov
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Russian Federation, Yaroslavl, 150000; Yaroslavl, 150007
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