An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)
- Autores: Rudyi A.S.1,2, Vasil’ev S.V.1,2, Lebedev M.E.2, Metlitskaya A.V.1,2, Mironenko A.A.2, Naumov V.V.2, Novozhilova A.V.1,2, Fedorov I.S.2, Churilov A.B.1,2
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Afiliações:
- Demidov Yaroslavl State University
- Institute of Physics and Technology (Yaroslavl Branch)
- Edição: Volume 43, Nº 6 (2017)
- Páginas: 503-506
- Seção: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/204839
- DOI: https://doi.org/10.1134/S106378501706013X
- ID: 204839
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Resumo
The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.
Sobre autores
A. Rudyi
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Autor responsável pela correspondência
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150000; Yaroslavl, 150007
S. Vasil’ev
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150000; Yaroslavl, 150007
M. Lebedev
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150007
A. Metlitskaya
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150000; Yaroslavl, 150007
A. Mironenko
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150007
V. Naumov
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150007
A. Novozhilova
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150000; Yaroslavl, 150007
I. Fedorov
Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150007
A. Churilov
Demidov Yaroslavl State University; Institute of Physics and Technology (Yaroslavl Branch)
Email: rudy@uniyar.ac.ru
Rússia, Yaroslavl, 150000; Yaroslavl, 150007
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