Charging Dielectrics when Bombarded with Ar+ Ions of Medium Energies

Abstract

A complex facility for measuring the kinetics of high-voltage charging potentials of the surface of massive dielectrics when irradiated with medium-energy Ar⁺ ions has been created. Measurements of ion emission characteristics, accumulated charges and surface potential have shown effective charging to high positive potentials, close in value to the potential of an ion gun. It is assumed that sputtered ions dominate at the early stage of charging in the process of emission, while in the final stage of irradiation backreflected ions dominate.