Specific features of the atomic structure of metallic layers of multilayered (CoFeZr/SiO2)32 and (CoFeZr/a-Si)40 nanostructures with different interlayers

Abstract

Multilayered nanostructures (MN) were prepared by ion-beam successive sputtering from two targets, one of which was a metallic Co₄₅Fe₄₅Zr₁₀ alloy plate and another target was a quartz (SiO₂) or silicon plate on the surface of a rotating glass-ceramic substrate in an argon atmosphere. The Co and Fe K edges X-ray absorption fine structure of XANES in the (CoFeZr/SiO₂)₃₂ sample with oxide interlayers was similar to XANES of metallic Fe foil. This indicated the existence in metallic layers of multilayered CoFeZr nanocrystals with a local environment similar to the atomic environment in solid solutions on the base of bcc Fe structure, which is also confirmed by XRD data. XANES near the Co and Fe K edges absorption in another multilayered nanostructure with silicon interlayers (CoFeZr/a-Si)₄₀ differs from XANES of MN with dielectric SiO₂ interlayer, which demonstrates a dominant influence of the Fe–Si and Co–Si bonds in the local environment of 3d Co and Fe metals when they form CoFeSi-type silicide phases in thinner bilayers of this MN.