Study of the evolution of the atomic composition of thin NbN films under irradiation with mixed ion beams by methods of electron energy loss spectroscopy

M. M. Dement’eva; K. E. Prikhod’ko; B. A. Gurovich; L. V. Kutuzov; D. A. Komarov

doi:10.1134/S1063783416110068

Study of the evolution of the atomic composition of thin NbN films under irradiation with mixed ion beams by methods of electron energy loss spectroscopy

作者: Dement’eva M.M.¹, Prikhod’ko K.E.¹^,2, Gurovich B.A.¹, Kutuzov L.V.¹, Komarov D.A.¹
隶属关系:
1. National Research Center Kurchatov Institute
2. National Research Nuclear University MEPhI
期: 卷 58, 编号 11 (2016)
页面: 2177-2181
栏目: Superconductivity
URL: https://bakhtiniada.ru/1063-7834/article/view/199008
DOI: https://doi.org/10.1134/S1063783416110068
ID: 199008

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The variation in the atomic composition of ultrathin NbN films under irradiation by mixed ion beams to a doze of 4 dpa (for nitrogen) is experimentally studied by methods of electron energy loss spectroscopy with a transmission electron microscope in the transmission scan mode on cross-cut samples. The behavior of the substitution of nitrogen atoms by oxygen atoms has been established; it is characterized by changing the composition of the conducting part of the film from NbN to NbNO.