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Monte Carlo Simulation of Ga Droplet Movement during the GaAs Langmuir Evaporation


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Abstract

A kinetic lattice Monte Carlo model is used to study the Ga droplets self-propelled motion along GaAs(111)A and (111)B surfaces during the initial stage of high-temperature annealing. An estimation of the droplet velocity, running along (111)A and (111)B surfaces, in a wide temperature range, is carried out. The mechanism of small Ga drops movement during high-temperature annealing is suggested. Different directions of droplets motion and the morphology of drop-crystal interface on (111)A and (111)B substrates are determined by a difference in the etching rate of (111)A and (111)B facets by liquid gallium. It is shown that metal droplets can cause step bunching.

About the authors

A. A. Spirina

A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University

Author for correspondence.
Email: spirina.anna.alex@gmail.com
Russian Federation, Novosibirsk; Novosibirsk, 630073

A. G. Nastovjak

A.V. Rzhanov Institute of Semiconductor Physics SB RAS

Email: spirina.anna.alex@gmail.com
Russian Federation, Novosibirsk

I. G. Neizvestny

A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University

Email: spirina.anna.alex@gmail.com
Russian Federation, Novosibirsk; Novosibirsk, 630073

N. L. Shwartz

A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University

Email: spirina.anna.alex@gmail.com
Russian Federation, Novosibirsk; Novosibirsk, 630073

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