High-temperature diffusion of magnesium in dislocation-free silicon

Abstract

The diffusion doping of dislocation-free single-crystal silicon with magnesium is studied in the temperature range 1000–1200°C. The conventional sandwich method is used as the doping method. It is found that the diffusion coefficient of magnesium is described by a universal Arrhenius curve in the extended temperature range 600–1200°C, with data earlier obtained for the range 600–800°C taken into consideration. The relatively low activation energy of diffusion transport (1.83 eV) is indicative of the interstitial mechanism of impurity diffusion.