电邮这篇文章 Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures
- 作者: Popovskikh K.G.1, Soldatov V.S.1, Oreshkov M.V.2
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隶属关系:
- National Research University – Moscow Power Engineering Institute (MPEI)
- Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
- 期: 卷 59, 编号 9 (2016)
- 页面: 904-910
- 栏目: Nanometrology
- URL: https://bakhtiniada.ru/0543-1972/article/view/245484
- DOI: https://doi.org/10.1007/s11018-016-1065-3
- ID: 245484
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详细
A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement technique to obtain information needed to correct the production process is created. The complex includes programs to control the measurement and calculation of required characteristics.
作者简介
K. Popovskikh
National Research University – Moscow Power Engineering Institute (MPEI)
编辑信件的主要联系方式.
Email: k.popovskikh@mail.ru
俄罗斯联邦, Moscow
V. Soldatov
National Research University – Moscow Power Engineering Institute (MPEI)
Email: k.popovskikh@mail.ru
俄罗斯联邦, Moscow
M. Oreshkov
Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
Email: k.popovskikh@mail.ru
俄罗斯联邦, Moscow
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