Email this article Hardware/Software Complex for Electrophysical Management of CMOS Technology on Test Structures
- Authors: Popovskikh K.G.1, Soldatov V.S.1, Oreshkov M.V.2
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Affiliations:
- National Research University – Moscow Power Engineering Institute (MPEI)
- Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
- Issue: Vol 59, No 9 (2016)
- Pages: 904-910
- Section: Nanometrology
- URL: https://bakhtiniada.ru/0543-1972/article/view/245484
- DOI: https://doi.org/10.1007/s11018-016-1065-3
- ID: 245484
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Abstract
A combined procedural and hardware complex of electrophysical methods for management of submicrometric CMOS integrated circuit technology is developed and implemented. Programmable switching of the elements of the complex that makes it possible to utilize a mutually complementary measurement technique to obtain information needed to correct the production process is created. The complex includes programs to control the measurement and calculation of required characteristics.
About the authors
K. G. Popovskikh
National Research University – Moscow Power Engineering Institute (MPEI)
Author for correspondence.
Email: k.popovskikh@mail.ru
Russian Federation, Moscow
V. S. Soldatov
National Research University – Moscow Power Engineering Institute (MPEI)
Email: k.popovskikh@mail.ru
Russian Federation, Moscow
M. V. Oreshkov
Federal Scientific Center – Research Institute for System Studies, Russian Academy of Sciences
Email: k.popovskikh@mail.ru
Russian Federation, Moscow
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