The Design and Characteristics of a 630-mm Phase-Shifting Interferometer

D. E. Silin; I. E. Kozhevatov; E. H. Kulikova; A. V. Pigasin; S. B. Speransky; S. A. Bel’kov; I. N. Derkach; D. I. Lobachev; I. E. Chernov

doi:10.1134/S0020441218020215

The Design and Characteristics of a 630-mm Phase-Shifting Interferometer

Authors: Silin D.E.¹, Kozhevatov I.E.¹, Kulikova E.H.¹, Pigasin A.V.¹, Speransky S.B.¹, Bel’kov S.A.², Derkach I.N.², Lobachev D.I.², Chernov I.E.²
Affiliations:
1. Federal Research Center, Institute of Applied Physics
2. Russian Federal Nuclear Center
Issue: Vol 61, No 3 (2018)
Pages: 393-399
Section: General Experimental Techniques
URL: https://bakhtiniada.ru/0020-4412/article/view/160232
DOI: https://doi.org/10.1134/S0020441218020215
ID: 160232

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Abstract

A large-aperture Fizeau interferometer has been developed for measuring the characteristics of optical elements with flat surfaces. The interferometer has two fields of view with dimensions of 630 and 100 mm and with transverse resolutions of 0.63 and 0.1 mm/pixel, respectively. Due to the calibration of the reference plates, the absolute measurement accuracy of the interferometer is λ/1000 RMS (λ = 632.8 nm) on a 630-mm field of view.