Size and Charge Distributions of Stable Clusters Formed in Ion Sputtering of Metals

Resumo

A theory of ion sputtering of metals in the form of neutral and charged clusters with their subsequent fragmentation into the stable state is developed. The theory is based on simple physical assumptions and is in good agreement with experiment. Results are presented in the form of formulas convenient for practical application. As an example, calculations of the total yield of stable neutral and charged clusters of silver, indium, and niobium are carried out.