Email this article Size and Charge Distributions of Stable Clusters Formed in Ion Sputtering of Metals
- Authors: Matveev V.I.1, Kapustin S.N.1
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Affiliations:
- Northern (Arctic) Federal University Named after M. V. Lomonosov
- Issue: Vol 59, No 6 (2016)
- Pages: 768-774
- Section: Condensed-State Physics
- URL: https://bakhtiniada.ru/1064-8887/article/view/237292
- DOI: https://doi.org/10.1007/s11182-016-0835-3
- ID: 237292
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Abstract
A theory of ion sputtering of metals in the form of neutral and charged clusters with their subsequent fragmentation into the stable state is developed. The theory is based on simple physical assumptions and is in good agreement with experiment. Results are presented in the form of formulas convenient for practical application. As an example, calculations of the total yield of stable neutral and charged clusters of silver, indium, and niobium are carried out.
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About the authors
V. I. Matveev
Northern (Arctic) Federal University Named after M. V. Lomonosov
Author for correspondence.
Email: mezon98@mail.ru
Russian Federation, Arkhangelsk
S. N. Kapustin
Northern (Arctic) Federal University Named after M. V. Lomonosov
Email: mezon98@mail.ru
Russian Federation, Arkhangelsk
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