Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films

Abstract

A thermodynamic investigation of plasmochemical processes taking place in a magnetron during sputtering of the targets consisting of indium and dysprosium ions is performed, which allowed identifying the feasibility of forming under the given conditions certain amounts of the chemical compounds In₂O₃, Dy₂O₃, DyInO₃. In the thermodynamic analysis of the equilibrium compositions during magnetron sputtering of the films, a universal TERRA software program is used.