The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering
- 作者: Tumarkin A.V.1, Razumov S.V.1, Gagarin A.G.1, Altynnikov A.G.1, Stozharov V.M.2, Kaptelov E.Y.3, Senkevich S.V.3, Pronin I.P.3
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隶属关系:
- St. Petersburg State Electrotechnical University
- Herzen State Pedagogical University
- Ioffe Physical Technical Institute
- 期: 卷 42, 编号 2 (2016)
- 页面: 143-145
- 栏目: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/197105
- DOI: https://doi.org/10.1134/S1063785016020140
- ID: 197105
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详细
Submicron thin layers of BaZrxTi1–xO3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.
作者简介
A. Tumarkin
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376
S. Razumov
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376
A. Gagarin
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376
A. Altynnikov
St. Petersburg State Electrotechnical University
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376
V. Stozharov
Herzen State Pedagogical University
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 191186
E. Kaptelov
Ioffe Physical Technical Institute
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
S. Senkevich
Ioffe Physical Technical Institute
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
I. Pronin
Ioffe Physical Technical Institute
编辑信件的主要联系方式.
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
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