The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering


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详细

Submicron thin layers of BaZrxTi1–xO3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.

作者简介

A. Tumarkin

St. Petersburg State Electrotechnical University

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376

S. Razumov

St. Petersburg State Electrotechnical University

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376

A. Gagarin

St. Petersburg State Electrotechnical University

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376

A. Altynnikov

St. Petersburg State Electrotechnical University

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 197376

V. Stozharov

Herzen State Pedagogical University

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 191186

E. Kaptelov

Ioffe Physical Technical Institute

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021

S. Senkevich

Ioffe Physical Technical Institute

Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021

I. Pronin

Ioffe Physical Technical Institute

编辑信件的主要联系方式.
Email: Petrovich@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021

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