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Planar Capacitive Structures Based on Ferroelectric Barium Titanate–Stannate Films on Sapphire for Microwave Applications


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Abstract

The structural properties of ferroelectric barium titanate–stannate films on sapphire substrates and microwave characteristics of related planar capacitive elements have been investigated. The gas-medium composition during the film deposition has been established to affect significantly the crystal structure, phase composition, and electric characteristics of the films. The low dielectric loss and high controllability of planar capacitive elements based on barium titanate–stannate films in the frequency range of 2–60 GHz are demonstrated for the first time.

About the authors

A. V. Tumarkin

St. Petersburg Electrotechnical University LETI

Author for correspondence.
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376

M. V. Zlygostov

St. Petersburg Electrotechnical University LETI

Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376

A. G. Gagarin

St. Petersburg Electrotechnical University LETI

Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376

A. G. Altynnikov

St. Petersburg Electrotechnical University LETI

Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376

E. N. Sapego

St. Petersburg Electrotechnical University LETI

Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376

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