Features of Pulsed Laser Annealing of BC3 Films on a Sapphire Substrate
- Authors: Fominski V.Y.1, Romanov R.I.1, Solov’ev A.A.1, Vasil’evskii I.S.1, Safonov D.A.1, Ivanov A.A.1, Zinin P.V.2, Filonenko V.P.3
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Affiliations:
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences
- Vereshchagin Institute for High Pressure Physics, Russian Academy of Sciences
- Issue: Vol 45, No 5 (2019)
- Pages: 446-449
- Section: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/208301
- DOI: https://doi.org/10.1134/S1063785019050055
- ID: 208301
Cite item
Abstract
The morphology, chemical composition, microstructure, and electrical properties of BC3 thin films subjected to melting by a nanosecond laser pulse are investigated. The original films have been created by pulsed laser codeposition of B and C onto a sapphire substrate at 150 and 350°C. Morphological changes in the films depended on their initial structural state. However, a “frozen” structure of both films after irradiation corresponded to the B-saturated graphite-like phase, the local composition of which varied due to the formation of inclusions of amorphous boron carbide. Before and after irradiation, the films exhibited a slightly decreasing dependence of the surface resistance with increasing temperature from 4.2 to 330 K. After laser irradiation, the films resistance has decreased by a factor of ~2.6.
About the authors
V. Yu. Fominski
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Author for correspondence.
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409
R. I. Romanov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409
A. A. Solov’ev
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409
I. S. Vasil’evskii
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409
D. A. Safonov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409
A. A. Ivanov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409
P. V. Zinin
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 117342
V. P. Filonenko
Vereshchagin Institute for High Pressure Physics, Russian Academy of Sciences
Email: vyfominskij@mephi.ru
Russian Federation, TroitskMoscow, 142190
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