Features of Pulsed Laser Annealing of BC3 Films on a Sapphire Substrate


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Abstract

The morphology, chemical composition, microstructure, and electrical properties of BC3 thin films subjected to melting by a nanosecond laser pulse are investigated. The original films have been created by pulsed laser codeposition of B and C onto a sapphire substrate at 150 and 350°C. Morphological changes in the films depended on their initial structural state. However, a “frozen” structure of both films after irradiation corresponded to the B-saturated graphite-like phase, the local composition of which varied due to the formation of inclusions of amorphous boron carbide. Before and after irradiation, the films exhibited a slightly decreasing dependence of the surface resistance with increasing temperature from 4.2 to 330 K. After laser irradiation, the films resistance has decreased by a factor of ~2.6.

About the authors

V. Yu. Fominski

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Author for correspondence.
Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409

R. I. Romanov

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409

A. A. Solov’ev

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409

I. S. Vasil’evskii

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409

D. A. Safonov

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409

A. A. Ivanov

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 115409

P. V. Zinin

Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Email: vyfominskij@mephi.ru
Russian Federation, Moscow, 117342

V. P. Filonenko

Vereshchagin Institute for High Pressure Physics, Russian Academy of Sciences

Email: vyfominskij@mephi.ru
Russian Federation, TroitskMoscow, 142190

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