The detection of low concentrations of water molecules in plasma by methods of actinometry and simulation


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Correlations of H2O molecules and atoms of hydrogen concentrations in plasma of humid inert gases are studied. The observed data of water-vapor concentration are compared to the results of simulation of a plasma-chemical process. The scaling of the results is discussed.

作者简介

A. Bernatskiy

Lebedev Physical Institute

Email: ochkin@sci.lebedev.ru
俄罗斯联邦, Moscow, 119991

V. Ochkin

Lebedev Physical Institute

编辑信件的主要联系方式.
Email: ochkin@sci.lebedev.ru
俄罗斯联邦, Moscow, 119991

I. Kochetov

Lebedev Physical Institute; State Research Center of the Russian Federation Troitsk Institute of Innovative and Thermonuclear Research

Email: ochkin@sci.lebedev.ru
俄罗斯联邦, Moscow, 119991; Troitsk, Moscow, 108840

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