The photoemissive cell of a vacuum ultraviolet radiation detector array
- Authors: Il’ichev E.A.1, Kuleshov A.E.1, Nabiev R.M.1, Petrukhin G.N.1, Rychkov G.S.1, Teverovskaya E.G.1
-
Affiliations:
- National Research University of Electronic Technology
- Issue: Vol 43, No 4 (2017)
- Pages: 345-347
- Section: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/204174
- DOI: https://doi.org/10.1134/S1063785017040095
- ID: 204174
Cite item
Abstract
A photoemissive “solar-blind” cell of a vacuum ultraviolet detector array for the 50–225 nm wavelength range is described. The cell is a cavity in the shape of frustum of a pyramid in a silicon wafer, the walls of which are coated by polycrystalline diamond film acting the part of a photosensitive cathode. The design of the cell allows one to manage the work of the detector in the “pass through” mode; i.e., photons fall to one side of the wafer, and photoelectrons release from its opposite side. Estimation of photosensitivity of the cell gives a value of about ten photons.
About the authors
E. A. Il’ichev
National Research University of Electronic Technology
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow
A. E. Kuleshov
National Research University of Electronic Technology
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow
R. M. Nabiev
National Research University of Electronic Technology
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow
G. N. Petrukhin
National Research University of Electronic Technology
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow
G. S. Rychkov
National Research University of Electronic Technology
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow
E. G. Teverovskaya
National Research University of Electronic Technology
Author for correspondence.
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow
Supplementary files
