The photoemissive cell of a vacuum ultraviolet radiation detector array


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Abstract

A photoemissive “solar-blind” cell of a vacuum ultraviolet detector array for the 50–225 nm wavelength range is described. The cell is a cavity in the shape of frustum of a pyramid in a silicon wafer, the walls of which are coated by polycrystalline diamond film acting the part of a photosensitive cathode. The design of the cell allows one to manage the work of the detector in the “pass through” mode; i.e., photons fall to one side of the wafer, and photoelectrons release from its opposite side. Estimation of photosensitivity of the cell gives a value of about ten photons.

About the authors

E. A. Il’ichev

National Research University of Electronic Technology

Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow

A. E. Kuleshov

National Research University of Electronic Technology

Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow

R. M. Nabiev

National Research University of Electronic Technology

Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow

G. N. Petrukhin

National Research University of Electronic Technology

Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow

G. S. Rychkov

National Research University of Electronic Technology

Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow

E. G. Teverovskaya

National Research University of Electronic Technology

Author for correspondence.
Email: mstlena2@mail.ru
Russian Federation, Zelenograd, Moscow

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