The effect of diborane additive on the plasma-chemical properties of deposited carbon films

Abstract

We present the results of studies of the optical, electrical, and mechanical properties of diamondlike carbon films prepared by plasma-chemical vapor deposition from a mixture of methane and diborane in various proportions. Upon reaching the threshold concentration (~12%) of diborane in the mixture, inclusions of a new phase start to form in the structure of the films. This leads to nonlinear dependence of the interior stresses and the surface resistance of coatings on the composition of the mixture with minimum values corresponding to a diborane concentration of about 12%.