A study of distributed dielectric bragg reflectors for vertically emitting lasers of the near-IR range
- Authors: Blokhin S.A.1, Bobrov M.A.1, Kuzmenkov A.G.1,2, Blokhin A.A.1, Vasil’ev A.P.1,2, Guseva Y.A.1, Kulagina M.M.1, Karpovsky I.O.1,3, Zadiranov Y.M.1, Troshkov S.I.1, Prasolov N.D.1,4, Brunkov P.N.1,4, Levitsky V.S.5, Lisak V.1,4, Maleev N.A.1, Ustinov V.M.1,2
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Affiliations:
- Ioffe Physical Technical Institute
- Scientific and Technological Center of Microelectronics and Submicron Heterostructures
- St. Petersburg State Electrotechnical University (LETI)
- St. Petersburg ITMO National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
- Scientific and Technological Center of Thin-Film Technologies in Power Engineering
- Issue: Vol 42, No 10 (2016)
- Pages: 1049-1053
- Section: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/201790
- DOI: https://doi.org/10.1134/S1063785016100199
- ID: 201790
Cite item
Abstract
Studies aimed at optimization of the design of a dielectric distributed Bragg reflector (DBR) produced by the reactive magnetron sputtering method for applications in near-IR vertical-cavity surface-emitting lasers with intracavity contacts (ICC-VCSELs) are carried out. It is shown that the reflectivity of the dielectric DBRs based on SiO2/TiO2 decreases due to the polycrystalline structure of the TiO2 layers, which causes diffusive scattering of light. In contrast, amorphous Ta2O5 layers is characterized by a low surface roughness and low fluctuation in the refractive index. Single-mode ICC-VCSELs in the 980-nm spectral range with dielectric DBR based on SiO2/Ta2O5 with a threshold current less than 0.27 mA, electric resistance of less than 200 Ω, and differential efficiency of more than 0.8 W/A are demonstrated.
About the authors
S. A. Blokhin
Ioffe Physical Technical Institute
Author for correspondence.
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
M. A. Bobrov
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. G. Kuzmenkov
Ioffe Physical Technical Institute; Scientific and Technological Center of Microelectronics and Submicron Heterostructures
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 194021
A. A. Blokhin
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. P. Vasil’ev
Ioffe Physical Technical Institute; Scientific and Technological Center of Microelectronics and Submicron Heterostructures
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 194021
Yu. A. Guseva
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
M. M. Kulagina
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
I. O. Karpovsky
Ioffe Physical Technical Institute; St. Petersburg State Electrotechnical University (LETI)
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197376
Yu. M. Zadiranov
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
S. I. Troshkov
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
N. D. Prasolov
Ioffe Physical Technical Institute; St. Petersburg ITMO National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101
P. N. Brunkov
Ioffe Physical Technical Institute; St. Petersburg ITMO National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101
V. S. Levitsky
Scientific and Technological Center of Thin-Film Technologies in Power Engineering
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
V. Lisak
Ioffe Physical Technical Institute; St. Petersburg ITMO National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101
N. A. Maleev
Ioffe Physical Technical Institute
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
V. M. Ustinov
Ioffe Physical Technical Institute; Scientific and Technological Center of Microelectronics and Submicron Heterostructures
Email: blokh@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 194021
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