Selective excitation of eigenmodes in a multilayer thin film resonator on bulk acoustic waves

Abstract

We consider a method of control over the operating frequency of a resonator on bulk acoustic waves, which is based on the selective excitation of eigenmodes. The frequency switching is achieved by using several layers of a ferroelectric in the paraelectric state and applying a control voltage of appropriate magnitude and polarity to each layer. The principle of selectivity is formulated and the criterion function is defined, which ensure the most effective excitation of a selected eigenmode with the possible suppression of parasitic modes. An example of using this function for a resonator switched between four eigenmodes is presented.