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Variations in optical and structural properties of zinc oxide films after laser processing


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Resumo

Effect of laser annealing on electrical and optical properties of zinc oxide films is analyzed. The films are fabricated using the plasma-chemical deposition under low pressure. ZnO amorphization under modifying irradiation is demonstrated.

Sobre autores

D. Redka

Saint Petersburg Electrotechnical University “LETI”

Autor responsável pela correspondência
Email: dnredka@gmail.com
Rússia, ul. Professora Popova 5, St. Petersburg, 197376

N. Mukhin

Saint Petersburg Electrotechnical University “LETI”

Email: dnredka@gmail.com
Rússia, ul. Professora Popova 5, St. Petersburg, 197376

I. Zakharov

Saint Petersburg Electrotechnical University “LETI”

Email: dnredka@gmail.com
Rússia, ul. Professora Popova 5, St. Petersburg, 197376

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