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Structure of Ultrathin Polycrystalline Iron Films Grown on SiO2/Si(001)


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Abstract

The structure of polycrystalline Fe films grown on an oxidized Si(001) surface at room temperature has been studied by the technique of high-energy electron diffraction. It has been found that the grain orientation in the films depends of the amount of deposited iron. In Fe films less than 5 nm thick, grains have been found to be randomly oriented. Fe films more than 5 nm in thickness exhibit the (111) texture with an axis coinciding with the surface normal. The angular dispersion of the [111] direction in the Fe lattice from the surface normal is ±25°. It has been found that as the Fe films become thicker, the (111) texture changes to the (110) texture.

About the authors

V. V. Balashev

Institute of Automation and Control Processes, Far-East Branch; School of Natural Sciences

Author for correspondence.
Email: balashev@mail.dvo.ru
Russian Federation, ul. Radio 5, Vladivostok, 690041; Sukhanova 8, Vladivostok, 690090

V. V. Korobtsov

Institute of Automation and Control Processes, Far-East Branch; School of Natural Sciences

Email: balashev@mail.dvo.ru
Russian Federation, ul. Radio 5, Vladivostok, 690041; Sukhanova 8, Vladivostok, 690090

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