Relaxation of the electric current in Si3N4: Experiment and numerical simulation


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The relaxation of the electric current in a metal–nitride–oxide–semiconductor structure has been measured experimentally. The experiment has been compared with the calculation based on the two-band conduction model and the multiphonon mechanism of the ionization of traps. The upper estimate obtained for the recombination cross section from the comparison of the experiment with the calculation is found to be 5 × 10–13 cm2.

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Yu. Novikov

Rzhanov Institute of Semiconductor Physics, Siberian Branch

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Email: nov@isp.nsc.ru
俄罗斯联邦, pr. Akademika Lavrentieva 13, Novosibirsk, 630090

V. Gritsenko

Rzhanov Institute of Semiconductor Physics, Siberian Branch; Novosibirsk State University

Email: nov@isp.nsc.ru
俄罗斯联邦, pr. Akademika Lavrentieva 13, Novosibirsk, 630090; ul. Pirogova 2, Novosibirsk, 630090

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