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Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition


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Resumo

It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.

Sobre autores

D. Gromov

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

S. Dubkov

National Research University of Electronic Technology MIET

Autor responsável pela correspondência
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

A. Pavlov

Institute of Nanotechnologies of Microelectronics

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

S. Skorik

Technological Center Research and Production Complex

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

A. Trifonov

Lukin Scientific Research Institute of Physical Problems

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124460

E. Kirilenko

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

A. Shulyat’ev

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

Yu. Shaman

Technological Center Research and Production Complex

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

B. Rygalin

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498

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