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Dependence of Mechanical Stresses in Silicon Nitride Films on the Mode of Plasma-Enhanced Chemical Vapor Deposition
Novak A.V., Novak V.R., Dedkova A.A., Gusev E.E.
Structural and Morphological Properties of Hybrid Heterostructures Based on GaN Grown on a Compliant por-Si(111) Substrate
Seredin P.V., Goloshchapov D.L., Zolotukhin D.S., Lenshin A.S., Mizerov A.M., Arsentyev I.N., Leiste H., Rinke M.
Electronic Structure of SiN Layers on Si(111) and SiC/Si(111) Substrates
Timoshnev S.N., Mizerov A.M., Lapushkin M.N., Kukushkin S.A., Bouravleuv A.D.
Possibility of the use of intermediate carbidsiliconoxide nanolayers on polydiamond substrates for gallium nitride layers epitaxy
Averichkin P.A., Donskov A.A., Dukhnovsky M.P., Knyazev S.N., Kozlova Y.P., Yugova T.G., Belogorokhov I.A.
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