Author Details

Tatarinov, E. E.

Issue Section Title File
Vol 52, No 7 (2018) Fabrication, Treatment, and Testing of Materials and Structures Concentric Hexagonal GaN Structures for Nanophotonics, Fabricated by Selective Vapor-Phase Epitaxy with Ion-Beam Etching
Vol 52, No 16 (2018) 26th INTERNATIONAL SYMPOSIUM “NANOSTRUCTURES: PHYSICS AND TECHNOLOGY”. NANOSTRUCTURE TECHNOLOGY FIB Lithography Challenges of Si3N4/GaN Mask Preparation for Selective Epitaxy