Method for stepped etching of optical glass fibers
- 作者: Vasil’ev M.G.1, Vasil’ev A.M.1, Golovanov V.V.1, Izotov A.D.1, Shelyakin A.A.1
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隶属关系:
- Kurnakov Institute of General and Inorganic Chemistry
- 期: 卷 61, 编号 9 (2016)
- 页面: 1160-1162
- 栏目: Physical Methods of Investigation
- URL: https://bakhtiniada.ru/0036-0236/article/view/166768
- DOI: https://doi.org/10.1134/S0036023616090205
- ID: 166768
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详细
A method for stepped etching of optical glass fibers using various compositions of etching agents based on a 40% hydrofluoric acid (HF) and aqueous solutions of ammonium fluoride (NH4F) has been considered. Compositions, etching rates, the dependence of etching rate on temperature, and tyeh dependence of etching forms on composition have been determined. The potential use of the method for stepped etching of optical glass fibers in the manufacture of microelectronic devices has been demonstrated.
作者简介
M. Vasil’ev
Kurnakov Institute of General and Inorganic Chemistry
编辑信件的主要联系方式.
Email: mgvas@igic.ras.ru
俄罗斯联邦, Leninskii pr. 31, Moscow, 119991
A. Vasil’ev
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
俄罗斯联邦, Leninskii pr. 31, Moscow, 119991
V. Golovanov
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
俄罗斯联邦, Leninskii pr. 31, Moscow, 119991
A. Izotov
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
俄罗斯联邦, Leninskii pr. 31, Moscow, 119991
A. Shelyakin
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
俄罗斯联邦, Leninskii pr. 31, Moscow, 119991
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