Мақаланы E-mail арқылы жіберу Method for stepped etching of optical glass fibers
- Авторлар: Vasil’ev M.G.1, Vasil’ev A.M.1, Golovanov V.V.1, Izotov A.D.1, Shelyakin A.A.1
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Мекемелер:
- Kurnakov Institute of General and Inorganic Chemistry
- Шығарылым: Том 61, № 9 (2016)
- Беттер: 1160-1162
- Бөлім: Physical Methods of Investigation
- URL: https://bakhtiniada.ru/0036-0236/article/view/166768
- DOI: https://doi.org/10.1134/S0036023616090205
- ID: 166768
Дәйексөз келтіру
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Тек жазылушылар үшін
Аннотация
A method for stepped etching of optical glass fibers using various compositions of etching agents based on a 40% hydrofluoric acid (HF) and aqueous solutions of ammonium fluoride (NH4F) has been considered. Compositions, etching rates, the dependence of etching rate on temperature, and tyeh dependence of etching forms on composition have been determined. The potential use of the method for stepped etching of optical glass fibers in the manufacture of microelectronic devices has been demonstrated.
Авторлар туралы
M. Vasil’ev
Kurnakov Institute of General and Inorganic Chemistry
Хат алмасуға жауапты Автор.
Email: mgvas@igic.ras.ru
Ресей, Leninskii pr. 31, Moscow, 119991
A. Vasil’ev
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Ресей, Leninskii pr. 31, Moscow, 119991
V. Golovanov
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Ресей, Leninskii pr. 31, Moscow, 119991
A. Izotov
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Ресей, Leninskii pr. 31, Moscow, 119991
A. Shelyakin
Kurnakov Institute of General and Inorganic Chemistry
Email: mgvas@igic.ras.ru
Ресей, Leninskii pr. 31, Moscow, 119991
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