Gradient nanostructured coatings obtained by magnetron sputtering of a multiphase AlN–TiB2–TiSi2 target

Abstract

The preparation and analysis of gradient nanostructured coatings obtained by the method of the magnetron sputtering of a multiphase composite AlN–TiB₂–TiSi₂ target are described. The structure and phase and elemental compositions have been investigated by the methods of X-ray diffraction (XRD), atomic force microscopy (AFM), and electron microscopy (SEM and TEM, with energy-dispersive analysis). The mechanical properties of coatings were characterized by the method of nanoindentation. The coating formed consisted of three layers different in the elemental composition and structure, which determined its mechanical properties. The formation of structurally inhomogeneous coating is explained by the fact that the target to be sputtered consisted of three different components (AlN, 50 wt %; TiB₂, 35 wt %; TiSi₂, 15 wt %) inhomogeneously distributed over the volume of the target. The influence of different processes that occur upon the sputtering of multiphase targets by ions of inert gases on the formation of nanocomposite coatings with a gradient structure is discussed.