A Laboratory CVD Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

A. V. Gusel’nikov; A. V. Safronov; A. G. Kurenya; V. E. Arkhipov; S. G. Bolgarin; A. E. Ivanov; A. G. Kvashnin; A. V. Okotrub

doi:10.1134/S002044121804019X

A Laboratory CVD Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

Authors: Gusel’nikov A.V.¹, Safronov A.V.², Kurenya A.G.¹, Arkhipov V.E.¹, Bolgarin S.G.², Ivanov A.E.², Kvashnin A.G.²^,3, Okotrub A.V.¹^,3^,4
Affiliations:
1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch
2. Institute of Computational Technologies, Siberian Branch
3. Novosibirsk State University
4. OOO Karsi
Issue: Vol 61, No 4 (2018)
Pages: 604-609
Section: Laboratory Techniques
URL: https://bakhtiniada.ru/0020-4412/article/view/160351
DOI: https://doi.org/10.1134/S002044121804019X
ID: 160351

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Abstract

The functional structure and the design of a CVD reactor for the synthesis of vertically oriented carbon nanotube (VOCNT) arrays on silicon substrates are described. To synthesize VOCNTs, various organic compounds, viz., toluene, cyclohexane, and acetonitrile, and their mixtures in the liquid state were tested under normal conditions.