Control of the Profile and Curvature of the Surface of Single-Crystal Plates of X-Ray Optical Elements Using Piezoelectric Bimorphs

Abstract

The possibility of controlling the curvature of the profiles of the surface of X-ray optical elements using single-crystal SiO₂(011) plates of rectangular and trapezoidal shapes was studied. In bending regulators (BRs) of various forms, the active element was a piezoelectric bimorph glued to a single-crystal plate. Experimental and calculated data of changes in the profile and radius of curvature of the surface of the used plate are given. The influence of the forms of the components of the bending regulator is shown on the initial profile and surface curvature of X-ray optical elements.