An Experimental Technique for Studying the Synthesis of Nano- and Microparticles from an Aerosol at Various Spatial−Temporal Stages of a Process

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A technique has been developed and an experimental setup has been produced for studying the process of aerosol-assisted chemical vapor deposition. The technique is based on recording the intensity of a laser beam scattered by nano- and microparticles of a condensed (solid or liquid) phase formed at a certain time in a localized region of a reactor; it provides in situ measurements of the quantity and size of particles formed in the gas flow along the reactor axis. The developed technique and experimental setup have been tested in the process of pyrolytic synthesis of molybdenum sulfide particles from an aerosol.