An ultrahigh-vacuum multifunctional apparatus for synthesis and in situ investigation of low-dimensional structures by spectral magnetoellipsometry in the temperature range of 85–900 K
- Authors: Shevtsov D.V.1,2, Lyaschenko S.A.1,2, Varnakov S.N.1,2
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Affiliations:
- Kirenskiy Institute of Physics, Federal Research Center, Siberian Branch
- Reshetnev Siberial State Aerospace University
- Issue: Vol 60, No 5 (2017)
- Pages: 759-763
- Section: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/159946
- DOI: https://doi.org/10.1134/S0020441217050086
- ID: 159946
Cite item
Abstract
This paper presents the results of modernizing an ultrahigh-vacuum multifunctional apparatus that allows one to obtain semiconductor or metallic nanostructures in a single technological cycle and to investigate their optical and magneto-optical properties in a temperature range of 85–900 K. The capabilities of the developed system were demonstrated based on the example of studying the temperature dependence of the bulk Si permittivity via spectral ellipsometric measurements.
About the authors
D. V. Shevtsov
Kirenskiy Institute of Physics, Federal Research Center, Siberian Branch; Reshetnev Siberial State Aerospace University
Author for correspondence.
Email: snowman-82@mail.ru
Russian Federation, Krasnoyarsk, 660036; Krasnoyarsk, 660036
S. A. Lyaschenko
Kirenskiy Institute of Physics, Federal Research Center, Siberian Branch; Reshetnev Siberial State Aerospace University
Email: snowman-82@mail.ru
Russian Federation, Krasnoyarsk, 660036; Krasnoyarsk, 660036
S. N. Varnakov
Kirenskiy Institute of Physics, Federal Research Center, Siberian Branch; Reshetnev Siberial State Aerospace University
Email: snowman-82@mail.ru
Russian Federation, Krasnoyarsk, 660036; Krasnoyarsk, 660036
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